Applied Materials Building 100 EPIC Center Semiconductor Research and Development Laboratory, Air District Permit Application No. 700650

The Bay Area Air District is considering issuing an Authority to Construction and Permit to Operate under Air District Permit Application NO. 700650 for two new permitted stationary sources at the Applied Materials Arques campus at 974 East Arques Avenue in Sunnyvale: Source S-264, a semiconductor research and development laboratory containing vacuum deposition and plasma etching tools and wet process tools, with integral point of use abatement devices, eight packed bed acid scrubbers, a two sta...